Manufacturing method of multi-directional light scattering LED

ABSTRACT

A multidirectional light scattering LED and a manufacturing method thereof are disclosed. A metal oxide is irregular disposed over a second semiconductor layer and then is removed by etching. Part of the second semiconductor layer, part of a light-emitting layer or part of the first semiconductor layer is also removed so as to form a scattering layer. A transparent conductive layer is arranged over the second semiconductor layer while further a second electrode is disposed over the transparent conductive layer. A first electrode is installed on the scattering layer. Thus light output from the LED is scattered in multi-directions.

RELATED APPLICATIONS

This application is a Divisional patent application of application Ser.No. 11/409,003, filed on 24 Apr. 2006 now U.S. Pat. No. 7,476,912. Theentire disclosure of the prior application Ser. No. 11/409,003, fromwhich an oath or declaration is supplied, is considered a part of thedisclosure of the accompanying Divisional application and is herebyincorporated by reference.

BACKGROUND OF THE INVENTION

The present invention relates to a LED, especially to a multidirectionallight scattering LED and a manufacturing method thereof that uses ascattering layer to cause output light to become scattering inmulti-directions.

Since Light-emitting gallium nitride-based III-V group compoundsemiconductor devices are available on market at 1995, the manufacturingefficiency and yield rate are improved year after year. However, lightoutput from LED is non-directional.

Refer to Taiwanese patent application No. 546452, applied on May 3,2001, a LED illuminative device is disclosed. The device features onthat a plurality of LED chips is disposed on surface of an insulatedsphere. The LED chips are connected in series and wires are disposed onconductive parts of two ends. Transparent or translucent resin forpackage covers on the LED chips and part of the wires. The resin ismixed with powder of light scattering materials such as aluminum, gold,tungsten, titanium, or molybdenum.

Refer to FIG. 1, Taiwanese patent No. 229949, applied on Jan. 19, 2004,a light emitting diode and a manufacturing process thereof is disclosed.A light emitting diode includes a substrate 11′, a n-type semiconductorlayer 12′, a light emitting layer 13′, a p-type semiconductor layer 14′,a transparent conductive layer 15′, a n-type electrode 16′ and a p-typeelectrode 17′. The transparent conductive layer 15′ has a plurality ofconcave holes jogged inwards the surface of the epitaxy so as toincrease brightness of the LED due to scattering of the light passedthrough the concave holes.

Furthermore, refer to FIG. 2, Taiwanese patent No. 221036, applied onJun. 26, 2003, a light emitting diode and a manufacturing method thereofis disclosed. A light emitting diode includes a substrate 11′, a mixinglayer 18′ with a rough layer for diffusing incident light disposed overthe substrate 11′, a n-type semiconductor layer 12′ over the mixinglayer 18′, a light emitting layer 13′ over the n-type semiconductorlayer 12, and a p-type semiconductor layer 14′ formed over the lightemitting layer 13′. By the mixing layer 18′, the incident light isdiffused.

Therefore, it is learned that light output from LED only in singledirection is an important issue to be solved.

SUMMARY OF THE INVENTION

Therefore it is a primary object of the present invention to provide amultidirectional light scattering LED and a manufacturing methodthereof. A scattering layer is disposed over a first semiconductorlayer. According to various etching depth, the scattering layer is madefrom material of the first semiconductor layer, the light scatteringlayer, the second semiconductor layer or combinations of them. Thescattering layer uses metal oxide disposed irregularly so as to haveneedle-shape or columnar structure. Through such kind of structure,light output from the light-emitting layer is multi-directionalscattered.

It is another object of the present invention to provide amultidirectional light scattering LED and a manufacturing methodthereof. A refractive layer that is made from metal oxide is irregularlydisposed over a second semiconductor layer so as to make light emittedfrom the light-emitting layer become multidirectional scattering.

In order to achieve above objects, the present invention provides amultidirectional light scattering LED and a manufacturing methodthereof. A metal oxide is irregular disposed over a second semiconductorlayer and then is removed by etching. Part of the second semiconductorlayer, part of a light-emitting layer or part of the first semiconductorlayer is also removed so as to form a scattering layer. A transparentconductive layer is arranged over the second semiconductor layer whilefurther a second electrode is disposed over the transparent conductivelayer. A first electrode is installed on the scattering layer. Thuslight output from the LED is scattered in multi-directions.

Moreover, a refractive layer is irregularly arranged between the secondsemiconductor layer and the transparent conductive layer so as to makelight output from LED become scattering in multi-directions.

BRIEF DESCRIPTION OF THE DRAWINGS

The structure and the technical means adopted by the present inventionto achieve the above and other objects can be best understood byreferring to the following detailed description of the preferredembodiments and the accompanying drawings, wherein

FIG. 1 is a schematic drawing showing structure of a conventional LEDwith higher light emitting efficiency;

FIG. 2 is a schematic drawing showing structure of a conventional LEDwith higher light emitting efficiency;

FIG. 3A to FIG. 3C are schematic drawings showing manufacturingprocesses of an embodiment according to the present invention:

FIG. 4, an enlarged schematic drawing of a scattering layer of anembodiment in accordance with the present invention;

FIG. 5A is SEM (Scanning Electron Microscope) cross section of ascattering layer of an embodiment in accordance with the presentinvention;

FIG. 5B is SEM cross section of a scattering layer of an embodiment inaccordance with the present invention;

FIG. 6A to FIG. 6B are schematic drawings showing manufacturingprocesses of another embodiment according to the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

In order to solve the problem of direction of the output light,conventional way is to mix package materials with light scatteringmaterials or by disposition of a light-mixing layer over the substrate.The present invention disposes a scattering layer over a firstsemiconductor layer so as to achieve above objects.

Refer from FIG. 3A to FIG. 3C, the present invention includes a firstsemiconductor layer 11 formed over a substrate 10, a light emittinglayer 12 over the first semiconductor layer 11, a second semiconductorlayer 13 over the light emitting layer 12, and a metal oxide layer 14over the second semiconductor layer 13. In this embodiment, the metaloxide layer 14 uses titanium dioxide (TiO2) as an example. The titaniumdioxide is irregularly disposed on top of the second semiconductor layer13. Then run the etching process by an inductively coupled plasma (ICP)etcher. Refer to FIG. 3B, an irregular surface due to irregulardisposition of titanium dioxide is resulted in. A scattering layer 15having various etching depth resulted from irregular disposition of TiO2is formed over part of the first semiconductor layer 11. Later, atransparent conductive layer 16 is formed over part of the secondsemiconductor layer 13 while a second electrode 18 is arranged over partof the transparent conductive layer 16 as well as part of the secondsemiconductor layer 13. A first electrode 17 is disposed over thescattering layer 15.

The substrate 10 is an insulated substrate. The substrate 10 is madefrom one of the following material: sapphire, silicon carbide (SiC),silicon (Si), gallium arsenide (GaAs), lithium aluminum oxide (LiAlO2),Lithium Gallium Oxide (LiGaO2), or Aluminum Nitride (AlN).

Refer to FIG. 4, because that the scattering layer 15 with variousetching depth is resulted from irregular disposition of titanium dioxide(TiO2), the scattering layer 15 is various combinations of L1, L2 or L3and is determined by disposition of titanium dioxide as well as etchingtime. Thus the scattering layer 15 can be layer L1-material of the firstsemiconductor layer, L1 plus L2, materials of the first semiconductorlayer and the light emitting layer, or L1, L2 plus L3, materials of thefirst semiconductor layer, the light emitting layer and the secondsemiconductor layer.

Moreover, refer to FIG. 5A & FIG. 5B, it is learned that the height ofthe scattering layer can be L1, L2, L3 or combinations of them.

Refer from FIG. 6A to FIG. 6B, after finishing disposition of thescattering layer 15, a refractive layer 20 is arranged over the secondsemiconductor layer 13. The refractive layer 20 is made from metaloxide. In this embodiment, titanium dioxide (TiO2) is taken as anexample. For increasing irregular scattering effect, a transparentconductive layer 16 is disposed on part of the refractive layer 20 whilea second electrode 18 is disposed on part of the refractive layer 20 aswell as part of the transparent conductive layer 16.

In summary, the present invention forms a scattering layer over a firstsemiconductor layer by etching so as to make light output form LED insingle direction turn into multi-directional scattering.

Additional advantages and modifications will readily occur to thoseskilled in the art. Therefore, the invention in its broader aspects isnot limited to the specific details, and representative devices shownand described herein. Accordingly, various modifications may be madewithout departing from the spirit or scope of the general inventiveconcept as defined by the appended claims and their equivalents.

1. A manufacturing method of multidirectional light scattering LEDcomprising steps of: forming a substrate; forming a first semiconductorlayer over the substrate; forming a light emitting layer over the firstsemiconductor layer; forming a second semiconductor layer over the lightemitting layer; forming a metal oxide layer over the secondsemiconductor layer and a part of the first semiconductor layer anddisposing the metal oxide layer thereof irregularly; etching the metaloxide layer in the part of the first semiconductor layer and forming ascattering layer over part of the first semiconductor layer; forming atransparent conductive layer and part of the transparent conductivelayer covering over the second semiconductor layer; forming a firstelectrode over the scattering layer; and forming a second electrode overpart of the second semiconductor layer and the transparent conductivelayer.
 2. The method as claimed in claim 1, wherein after the step ofetching, the method further having a step of: forming a refractive layerover the second semiconductor layer and disposing the refractive layerthereof irregularly.